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Amendment 1 to ISO 17331
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Publication date: 2010-07-15
Surface chemical analysis - Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy
Pages: 18
Publication date: 2004-05-15
Surface chemical analysis - Surface characterization - Measurement of the lateral resolution of a confocal fluorescence microscope
Publication date: 2015-06-15
Surface chemical analysis - Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
Pages: 32
Publication date: 2014-08-01
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
Publication date: 2013-02-15